Invention Grant
US07932572B2 Semiconductor device having memory element with stress insulating film
失效
具有应力绝缘膜的存储元件的半导体器件
- Patent Title: Semiconductor device having memory element with stress insulating film
- Patent Title (中): 具有应力绝缘膜的存储元件的半导体器件
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Application No.: US12358840Application Date: 2009-01-23
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Publication No.: US07932572B2Publication Date: 2011-04-26
- Inventor: Mikio Tsujiuchi
- Applicant: Mikio Tsujiuchi
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-034526 20080215
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
Provided are a semiconductor device having an MTJ element capable of intentionally shifting the variation, at the time of manufacture, of a switching current of an MRAM memory element in one direction; and a manufacturing method of the device. The semiconductor device has a lower electrode having a horizontally-long rectangular planar shape; an MTJ element having a vertically-long oval planar shape formed on the right side of the lower electrode; and an MTJ's upper insulating film having a horizontally-long rectangular planar shape similar to that of the lower electrode and covering the MTJ element therewith. As the MTJ's upper insulating film, a compressive stress insulating film or a tensile stress insulating film for applying a compressive stress or a tensile stress to the MTJ element is employed.
Public/Granted literature
- US20090206425A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2009-08-20
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