Invention Grant
US07932575B2 Method of fabricating back-illuminated imaging sensors using a bump bonding technique
有权
使用凸块接合技术制造背照式成像传感器的方法
- Patent Title: Method of fabricating back-illuminated imaging sensors using a bump bonding technique
- Patent Title (中): 使用凸块接合技术制造背照式成像传感器的方法
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Application No.: US12431150Application Date: 2009-04-28
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Publication No.: US07932575B2Publication Date: 2011-04-26
- Inventor: Mahalingam Bhaskaran , Pradyumna Kumar Swain , Peter Levine , Norman Goldsmith
- Applicant: Mahalingam Bhaskaran , Pradyumna Kumar Swain , Peter Levine , Norman Goldsmith
- Applicant Address: US CA Menlo Park
- Assignee: SRI International
- Current Assignee: SRI International
- Current Assignee Address: US CA Menlo Park
- Agency: Lowenstein Sandler PC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed. The method for manufacturing the imaging device includes the steps of providing a substrate comprising an insulator layer, and an epitaxial layer substantially overlying the insulator layer; fabricating at least one imaging component at least partially overlying and extending into the epitaxial layer; forming a plurality of bond pads substantially overlying the epitaxial layer; fabricating a dielectric layer substantially overlying the epitaxial layer and the at least one imaging component; providing a handle wafer; forming a plurality of conductive trenches in the handle wafer; forming a plurality of conductive bumps on a first surface of the handle wafer substantially underlying the conductive trenches; and bonding the plurality of conductive bumps to the plurality of bond pads.
Public/Granted literature
- US20090256227A1 METHOD OF FABRICATING BACK-ILLUMINATED IMAGING SENSORS USING A BUMP BONDING TECHNIQUE Public/Granted day:2009-10-15
Information query
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