Invention Grant
- Patent Title: Metal sealed wafer level CSP
- Patent Title (中): 金属密封晶圆级CSP
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Application No.: US12147578Application Date: 2008-06-27
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Publication No.: US07932602B2Publication Date: 2011-04-26
- Inventor: Haruyoshi Katagiri
- Applicant: Haruyoshi Katagiri
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Taft Stettinius & Hollister LLP
- Priority: JP2007-204355 20070806
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A semiconductor device comprising: (a) a semiconductor substrate having a dicing region circumscribing a chip region, the chip region including a central region and a peripheral region around the central region; (b) an active electrical structure formed to extend from a first main surface to a second surface vertically spaced apart from the last main surface in the central region of the semiconductor substrate; (c) a through dummy isolation structure formed within the peripheral region to extend from the first main surface of the semiconductor substrate to a third surface vertically spaced apart from the first main surface of the semiconductor substrate, the through dummy isolation structure surrounding the active electrical structure; (d) an insulating layer disbursed throughout the active electrical structure within the central region and around the through dummy isolation structure of the peripheral region, the insulating layer including top and opposed peripheral sides; and (e) a metal film located over the top and peripheral sides of the wiring insulating film and over the semiconductor substrate.
Public/Granted literature
- US20090039471A1 SEMICONDUCTOR DEVICE Public/Granted day:2009-02-12
Information query
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