Invention Grant
US07932646B2 Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield
失效
具有舞台，驱动单元和具有单独磁屏蔽的施力单元的曝光装置
- Patent Title: Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield
- Patent Title (中): 具有舞台，驱动单元和具有单独磁屏蔽的施力单元的曝光装置
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Application No.: US11971067Application Date: 2008-01-08
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Publication No.: US07932646B2Publication Date: 2011-04-26
- Inventor: Yugo Shibata
- Applicant: Yugo Shibata
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2007-005582 20070115; JP2007-322424 20071213
- Main IPC: H02K41/00
- IPC: H02K41/00
Abstract:
A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.
Public/Granted literature
- US20080169708A1 STAGE DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2008-07-17
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