Invention Grant
- Patent Title: Prober for testing devices in a repeat structure on a substrate
- Patent Title (中): 用于在衬底上以重复结构测试设备的探测器
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Application No.: US12345980Application Date: 2008-12-30
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Publication No.: US07932737B2Publication Date: 2011-04-26
- Inventor: Frank-Michael Werner , Matthias Zieger , Sebastian Giessmann
- Applicant: Frank-Michael Werner , Matthias Zieger , Sebastian Giessmann
- Applicant Address: US OR Beaverton
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Chernoff, Vilhauer, McClung & Stenzel
- Priority: DE102008003754 20080110
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
Public/Granted literature
- US20090179658A1 PROBER FOR TESTING DEVICES IN A REPEAT STRUCTURE ON A SUBSTRATE Public/Granted day:2009-07-16
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