Invention Grant
US07932788B2 Oscillating, deflectable micromechanical element and method for use thereof 有权
摆动,可偏转微机械元件及其使用方法

Oscillating, deflectable micromechanical element and method for use thereof
Abstract:
The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
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