Invention Grant
- Patent Title: Oscillating, deflectable micromechanical element and method for use thereof
- Patent Title (中): 摆动,可偏转微机械元件及其使用方法
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Application No.: US12298101Application Date: 2006-04-24
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Publication No.: US07932788B2Publication Date: 2011-04-26
- Inventor: Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
- Applicant: Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
- Applicant Address: DE München
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.v.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.v.
- Current Assignee Address: DE München
- Agency: Gibson & Dernier LLP
- Agent Matthew B. Dernier, Esq.
- International Application: PCT/DE2006/000745 WO 20060424
- International Announcement: WO2007/121692 WO 20071101
- Main IPC: H03B5/18
- IPC: H03B5/18 ; H01L27/14

Abstract:
The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
Public/Granted literature
- US20090302960A1 Oscillating, deflectable micromechanical element and method for use thereof Public/Granted day:2009-12-10
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