Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
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Application No.: US11828814Application Date: 2007-07-26
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Publication No.: US07932990B2Publication Date: 2011-04-26
- Inventor: Hisashi Namba , Tatsuya Hayashi
- Applicant: Hisashi Namba , Tatsuya Hayashi
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Divsion
- Priority: JP2006-209447 20060801
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G03B27/54

Abstract:
An exposure apparatus includes a projection optical system that projects a pattern of a reticle onto a wafer, a vacuum chamber in which the projection optical system is disposed, a partition provided in the vacuum chamber and dividing a first space (which is a space where at least a portion of the projection optical system exists) and a second space (which is a space other than the first space) from each other, a gas supplying unit that supplies gas to the first space, and a sealant that reduces flow of the gas supplied through a pipe into the second space.
Public/Granted literature
- US20080030705A1 EXPOSURE APPARATUS Public/Granted day:2008-02-07
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