Invention Grant
- Patent Title: Divided sub-image array scanning and exposing system
- Patent Title (中): 分割子图像阵列扫描和曝光系统
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Application No.: US11522215Application Date: 2006-09-16
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Publication No.: US07932993B2Publication Date: 2011-04-26
- Inventor: Wenhui Mei
- Applicant: Wenhui Mei
- Main IPC: G03B27/42
- IPC: G03B27/42

Abstract:
An “image writing” and “image reading” system and method for providing a pattern to a subject such as a wafer is provided or an image to an image sensor such as CCD. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display or other SLM, for generating for creating a plurality of sub-image array of the pattern in “image writing” case. The pixel elements are simultaneously divided to a sub-image array on the subject by a lens system. The system also includes a stage for moving, stepping or scanning the pixel panel, relative to the subject so that it can create a contiguous whole image on the subject.
Public/Granted literature
- US20080180648A1 Divided sub-image array scanning and exposing system Public/Granted day:2008-07-31
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