Invention Grant
US07932993B2 Divided sub-image array scanning and exposing system 有权
分割子图像阵列扫描和曝光系统

  • Patent Title: Divided sub-image array scanning and exposing system
  • Patent Title (中): 分割子图像阵列扫描和曝光系统
  • Application No.: US11522215
    Application Date: 2006-09-16
  • Publication No.: US07932993B2
    Publication Date: 2011-04-26
  • Inventor: Wenhui Mei
  • Applicant: Wenhui Mei
  • Main IPC: G03B27/42
  • IPC: G03B27/42
Divided sub-image array scanning and exposing system
Abstract:
An “image writing” and “image reading” system and method for providing a pattern to a subject such as a wafer is provided or an image to an image sensor such as CCD. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display or other SLM, for generating for creating a plurality of sub-image array of the pattern in “image writing” case. The pixel elements are simultaneously divided to a sub-image array on the subject by a lens system. The system also includes a stage for moving, stepping or scanning the pixel panel, relative to the subject so that it can create a contiguous whole image on the subject.
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