Invention Grant
- Patent Title: Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus
- Patent Title (中): 位移检测装置，位移测量装置和定点检测装置
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Application No.: US11438114Application Date: 2006-05-19
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Publication No.: US07933023B2Publication Date: 2011-04-26
- Inventor: Hideaki Tamiya
- Applicant: Hideaki Tamiya
- Applicant Address: JP Nara
- Assignee: Mori Seiki, Co., Ltd.
- Current Assignee: Mori Seiki, Co., Ltd.
- Current Assignee Address: JP Nara
- Agency: Rockey, Depke & Lyons, LLC
- Agent Robert J. Depke
- Priority: JP2005-150227 20050523
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A displacement detection apparatus includes a light source for emitting light and an extinction ratio conversion element which raises an extinction ratio of the light to 20 dB or more. A condenser lens condenses the light having the increased extinction ratio and a polarization maintaining type optical fiber transmits the condensed light which is subsequently transferred to a diffraction grating that is attached to an object to be measured. The displacement detection apparatus adjusts a polarization axis of the light having increased extinction ratio.
Public/Granted literature
- US20060279747A1 Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus Public/Granted day:2006-12-14
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