Invention Grant
US07933153B2 Method for extracting the distribution of charge stored in a semiconductor device 有权
提取存储在半导体器件中的电荷分布的方法

  • Patent Title: Method for extracting the distribution of charge stored in a semiconductor device
  • Patent Title (中): 提取存储在半导体器件中的电荷分布的方法
  • Application No.: US11916796
    Application Date: 2006-06-06
  • Publication No.: US07933153B2
    Publication Date: 2011-04-26
  • Inventor: Arnaud Furnémont
  • Applicant: Arnaud Furnémont
  • Applicant Address: BE Leuven
  • Assignee: IMEC
  • Current Assignee: IMEC
  • Current Assignee Address: BE Leuven
  • Agency: McDonnell Boehnen Hulbert & Berghoff LLP
  • Priority: EP05109600 20051014
  • International Application: PCT/EP2006/062944 WO 20060606
  • International Announcement: WO2006/128922 WO 20061207
  • Main IPC: G11C11/34
  • IPC: G11C11/34
Method for extracting the distribution of charge stored in a semiconductor device
Abstract:
The invention relates to a method for determining a set of programming conditions for a given type of charge-trapping non-volatile memory device, comprising the steps of: (a) selecting different sets of programming parameters to be applied to the corresponding number of non-volatile memory devices of said type, (b) programming said number of non-volatile memory devices by means of the sets of programming parameters, (c) determining an actual spatial charge distribution of the charge trapping layer of each of the programmed devices, (d) determining the influence of at least one of the programming parameters on the spatial charge distribution, (e) determining an optimised value for at least one of the programming parameters, (f) entering each optimized value in said sets of programming parameters and repeating steps b) to e) at least once.
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