Invention Grant
- Patent Title: Ranged fault signatures for fault diagnosis
- Patent Title (中): 用于故障诊断的远程故障签名
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Application No.: US12004667Application Date: 2007-12-19
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Publication No.: US07934125B2Publication Date: 2011-04-26
- Inventor: Jerry Lynn Harvey, Jr. , Alexander T. Schwarm
- Applicant: Jerry Lynn Harvey, Jr. , Alexander T. Schwarm
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G06F11/00
- IPC: G06F11/00
Abstract:
Process data is analyzed, the process data having been generated during a manufacturing process to detect a fault. One or more process variables of the manufacturing process that contributed to the fault are determined. A relative contribution of each of the one or more process variables to the fault is determined. A fault signature having relative contribution ranges for at least one of the one or more process variables is generated, the relative contribution ranges based on the determined relative contributions.
Public/Granted literature
- US20080125898A1 Ranged fault signatures for fault diagnosis Public/Granted day:2008-05-29
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