Invention Grant
US07934174B2 Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout 有权
使用数据库快速识别和纠正布局中的制造问题区域的方法和装置

Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout
Abstract:
One embodiment provides a system for using a database to quickly identify a manufacturing problem area in a layout. During operation, the system receives a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature. Next, the system determines a first sample using the first check-figure, wherein the first sample represents the first layout's geometry within a first ambit of the first check-figure, wherein the first sample's geometry is expected to affect the shape of the first feature. The system then performs a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems. Next, the system stores the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.
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