Invention Grant
US07934390B2 Method for manufacturing a lens of synthetic quartz glass with increased H2 content
有权
制造具有增加的H2含量的合成石英玻璃透镜的方法
- Patent Title: Method for manufacturing a lens of synthetic quartz glass with increased H2 content
- Patent Title (中): 制造具有增加的H2含量的合成石英玻璃透镜的方法
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Application No.: US11748151Application Date: 2007-05-14
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Publication No.: US07934390B2Publication Date: 2011-05-03
- Inventor: Eric Eva
- Applicant: Eric Eva
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102006023355 20060517
- Main IPC: C03C21/00
- IPC: C03C21/00 ; C03C19/00

Abstract:
The invention relates to a method for the manufacture of a lens of synthetic quartz glass with increased H2 content, in particular for a lens for an optical system with an operating wavelength of less than 250 nm, in particular less than 200 nm, with the steps: providing a precursor product of synthetic quartz glass, in particular with a first H2 content of less than 2·1015 molecules/cm3, with a circumferential border surface and two base surfaces lying on opposite sides, wherein at least one partial surface of at least one of said base surfaces has a curvature, and treating the precursor product in an H2-containing atmosphere in order to produce a precursor product of synthetic quartz glass with a second H2 content that is increased in relation to the first H2 content, in particular with a second H2 content of more than 1016 molecules/cm3, and measuring at least one optical property of said precursor product with said second H2 content.
Public/Granted literature
- US20070266733A1 METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INCREASED H2 CONTENT Public/Granted day:2007-11-22
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