Invention Grant
US07934390B2 Method for manufacturing a lens of synthetic quartz glass with increased H2 content 有权
制造具有增加的H2含量的合成石英玻璃透镜的方法

  • Patent Title: Method for manufacturing a lens of synthetic quartz glass with increased H2 content
  • Patent Title (中): 制造具有增加的H2含量的合成石英玻璃透镜的方法
  • Application No.: US11748151
    Application Date: 2007-05-14
  • Publication No.: US07934390B2
    Publication Date: 2011-05-03
  • Inventor: Eric Eva
  • Applicant: Eric Eva
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss SMT GmbH
  • Current Assignee: Carl Zeiss SMT GmbH
  • Current Assignee Address: DE Oberkochen
  • Agency: Sughrue Mion, PLLC
  • Priority: DE102006023355 20060517
  • Main IPC: C03C21/00
  • IPC: C03C21/00 C03C19/00
Method for manufacturing a lens of synthetic quartz glass with increased H2 content
Abstract:
The invention relates to a method for the manufacture of a lens of synthetic quartz glass with increased H2 content, in particular for a lens for an optical system with an operating wavelength of less than 250 nm, in particular less than 200 nm, with the steps: providing a precursor product of synthetic quartz glass, in particular with a first H2 content of less than 2·1015 molecules/cm3, with a circumferential border surface and two base surfaces lying on opposite sides, wherein at least one partial surface of at least one of said base surfaces has a curvature, and treating the precursor product in an H2-containing atmosphere in order to produce a precursor product of synthetic quartz glass with a second H2 content that is increased in relation to the first H2 content, in particular with a second H2 content of more than 1016 molecules/cm3, and measuring at least one optical property of said precursor product with said second H2 content.
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