Invention Grant
- Patent Title: Capacitative pressure sensor
- Patent Title (中): 电容式压力传感器
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Application No.: US12642828Application Date: 2009-12-20
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Publication No.: US07934427B2Publication Date: 2011-05-03
- Inventor: Kia Silverbrook , Samuel George Mallinson
- Applicant: Kia Silverbrook , Samuel George Mallinson
- Applicant Address: AU Balmain, New South Wales
- Assignee: Silverbrook Research Pty Ltd
- Current Assignee: Silverbrook Research Pty Ltd
- Current Assignee Address: AU Balmain, New South Wales
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.
Public/Granted literature
- US20100095777A1 Capacitative Pressure Sensor Public/Granted day:2010-04-22
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