Invention Grant
- Patent Title: Apparatus and method for scribing substrate
- Patent Title (中): 用于划线衬底的装置和方法
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Application No.: US11126733Application Date: 2005-05-10
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Publication No.: US07934976B2Publication Date: 2011-05-03
- Inventor: Kwang Jong Yoo
- Applicant: Kwang Jong Yoo
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Brinks Hofer Gilson & Lione
- Priority: KR10-2004-0032937 20040511
- Main IPC: B24B49/00
- IPC: B24B49/00 ; B24B51/00 ; B26D5/00 ; B26D3/08 ; B31B1/25 ; B26F3/00
Abstract:
A scribing apparatus for scribing a substrate improves productivity as well as prevents substrate deterioration. The apparatus according to an embodiment of the present invention includes a wheel to scribe a substrate, a refrigerant supplier installed near one side of the wheel to spray a refrigerant to the substrate; and a hot steam supplier installed near the other side of the wheel to spray a hot steam to the substrate.
Public/Granted literature
- US20050252943A1 Apparatus and method for scribing substrate Public/Granted day:2005-11-17
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