Invention Grant
- Patent Title: Retaining ring with tapered inner surface
- Patent Title (中): 带锥形内表面的保持环
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Application No.: US12687804Application Date: 2010-01-14
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Publication No.: US07934979B2Publication Date: 2011-05-03
- Inventor: Dan A. Marohl , Ming-Kuei Tseng
- Applicant: Dan A. Marohl , Ming-Kuei Tseng
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B47/26
- IPC: B24B47/26
Abstract:
A retaining ring has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The outer diameter surface includes an outwardly projecting flange having a lower surface, and the bottom surface includes a plurality of channels.
Public/Granted literature
- US20100112914A1 RETAINING RING WITH TAPERED INNER SURFACE Public/Granted day:2010-05-06
Information query
