Invention Grant
- Patent Title: Method of selectively removing conductive material
- Patent Title (中): 选择性去除导电材料的方法
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Application No.: US11507291Application Date: 2006-08-21
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Publication No.: US07935242B2Publication Date: 2011-05-03
- Inventor: Rita J. Klein , Dale W. Collins , Paul Morgan , Joseph N. Greeley , Nishant Sinha
- Applicant: Rita J. Klein , Dale W. Collins , Paul Morgan , Joseph N. Greeley , Nishant Sinha
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Whyte Hirschboeck Dudek SC
- Main IPC: C25F3/16
- IPC: C25F3/16

Abstract:
An electrolyte solution, methods, and systems for selectively removing a conductive metal from a substrate are provided. The electrolyte solution comprising nanoparticles that are more noble than the conductive metal being removed, is applied to a substrate to remove the conductive metal selectively relative to a dielectric material without application of an external potential or contact of a processing pad with the surface of the substrate. The solutions and methods can be applied, for example, to remove a conductive metal layer (e.g., barrier metal) selectively relative to dielectric material and to a materially different conductive metal (e.g., copper interconnect) without application of an external potential or contact of a processing pad with the surface of the substrate.
Public/Granted literature
- US20080041725A1 Method of selectively removing conductive material Public/Granted day:2008-02-21
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