Invention Grant
- Patent Title: Silicon production with a fluidized bed reactor integrated into a siemens-type process
- Patent Title (中): 硅生产与流化床反应器集成到西门子型工艺中
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Application No.: US11512853Application Date: 2006-08-30
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Publication No.: US07935327B2Publication Date: 2011-05-03
- Inventor: Arvid Neil Arvidson , Michael Molnar
- Applicant: Arvid Neil Arvidson , Michael Molnar
- Applicant Address: US MI Hemlock
- Assignee: Hemlock Semiconductor Corporation
- Current Assignee: Hemlock Semiconductor Corporation
- Current Assignee Address: US MI Hemlock
- Agent Catherine U. Brown
- Main IPC: C01B33/027
- IPC: C01B33/027
Abstract:
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
Public/Granted literature
- US20080056979A1 Silicon production with a fluidized bed reactor integrated into a siemens-type process Public/Granted day:2008-03-06
Information query
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