Invention Grant
- Patent Title: Method for making crystalline composition
- Patent Title (中): 制造结晶组合物的方法
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Application No.: US11313528Application Date: 2005-12-20
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Publication No.: US07935382B2Publication Date: 2011-05-03
- Inventor: Dong-Sil Park , Mark Philip D'Evelyn , Myles Standish Peterson, II , John Thomas Leman , Joell Randolph Hibshman, II , Fred Sharifi
- Applicant: Dong-Sil Park , Mark Philip D'Evelyn , Myles Standish Peterson, II , John Thomas Leman , Joell Randolph Hibshman, II , Fred Sharifi
- Applicant Address: US NY Albany
- Assignee: Momentive Performance Materials, Inc.
- Current Assignee: Momentive Performance Materials, Inc.
- Current Assignee Address: US NY Albany
- Agent Joseph E. Waters
- Main IPC: C23C16/34
- IPC: C23C16/34
Abstract:
A method of making a metal nitride is provided. The method may include introducing a metal in a chamber. A nitrogen-containing material may be flowed into the chamber. Further, a hydrogen halide may be introduced. The nitrogen-containing material may react with the metal in the chamber to form the metal nitride.
Public/Granted literature
- US20070141819A1 Method for making crystalline composition Public/Granted day:2007-06-21
Information query
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