Invention Grant
- Patent Title: Photo-masks and methods of fabricating surface-relief grating diffractive devices
- Patent Title (中): 光掩模和制造表面浮雕光栅衍射装置的方法
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Application No.: US11767372Application Date: 2007-06-22
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Publication No.: US07935459B2Publication Date: 2011-05-03
- Inventor: Thomas K. Gaylord , Justin L. Stay , Jonathan S. Maikisch , James D. Meindl
- Applicant: Thomas K. Gaylord , Justin L. Stay , Jonathan S. Maikisch , James D. Meindl
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Troutman Sanders LLP
- Agent Ryan A. Schneider, Esq.; Dean Y. Shahriari
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G02B5/18

Abstract:
Photo-masks for fabricating surface-relief grating diffractive devices and methods of fabricating surface-relief grating diffractive devices are described. The photo-mask can include refractive elements and/or diffractive elements contained in or on a body element. The photo-mask can be used to simultaneously produce multiple surface-relief grating diffractive devices in a recording material. The photo-mask enables the surface-relief grating diffractive devices to be produced in large quantities while significantly reducing the cost and labor required.
Public/Granted literature
- US20080003528A1 PHOTO-MASKS AND METHODS OF FABRICATING SURFACE-RELIEF GRATING DIFFRACTIVE DEVICES Public/Granted day:2008-01-03
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