Invention Grant
- Patent Title: Mask blank for EUV exposure and mask for EUV exposure
- Patent Title (中): EUV暴露的掩护空白和EUV暴露的掩码
-
Application No.: US12209380Application Date: 2008-09-12
-
Publication No.: US07935460B2Publication Date: 2011-05-03
- Inventor: Masatoshi Hirono
- Applicant: Masatoshi Hirono
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,NEC Corporation
- Current Assignee: Kabushiki Kaisha Toshiba,NEC Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-240466 20070918
- Main IPC: G03F1/00
- IPC: G03F1/00 ; B32B17/10

Abstract:
Provided are a mask for EUV exposure and a mask blank for EUV exposure for manufacturing the same, so as to improve the contrast of ultraviolet inspection light and improve the inspection performance for the mask. This mask blank for EUV exposure includes a substrate, a reflecting layer which is provided on the substrate and reflects EUV light, and an absorbent layer which is provided on the reflecting layer and absorbs EUV light. Reflectance of light at a wavelength between 150 nm and 300 nm is greater at the absorbent layer than that of the reflecting layer. The mask for EUV exposure can be manufactured by processing this mask blank for EUV exposure.
Public/Granted literature
- US20090075184A1 MASK BLANK FOR EUV EXPOSURE AND MASK FOR EUV EXPOSURE Public/Granted day:2009-03-19
Information query