Invention Grant
- Patent Title: Image sensor and method for manufacturing the same
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US11998606Application Date: 2007-11-30
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Publication No.: US07935551B2Publication Date: 2011-05-03
- Inventor: Ki Sik Im , Woo Seok Hyun
- Applicant: Ki Sik Im , Woo Seok Hyun
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney; Duangkamol Kay Strohl
- Priority: KR10-2006-0131288 20061220
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0232 ; H01L31/00 ; H01L27/146

Abstract:
A method for manufacturing a sensor image may include forming a pixel array including a photodiode structure and an insulating film structure in an active area of a semiconductor substrate; forming a metal pad on the insulating film structure; forming a dielectric and/or etch stop film on the metal pad (and optionally over the pixel array); forming a protective layer on the dielectric and/or etch stop film; and forming a pad opening and a pixel opening by etching the protective layer.
Public/Granted literature
- US20080150060A1 Image sensor and method for manufacturing the same Public/Granted day:2008-06-26
Information query
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