Invention Grant
US07935558B1 Sodium salt containing CIG targets, methods of making and methods of use thereof
有权
含有CIG靶的钠盐，制备方法及其使用方法
- Patent Title: Sodium salt containing CIG targets, methods of making and methods of use thereof
- Patent Title (中): 含有CIG靶的钠盐，制备方法及其使用方法
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Application No.: US12907595Application Date: 2010-10-19
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Publication No.: US07935558B1Publication Date: 2011-05-03
- Inventor: Daniel R. Juliano , Robert Tas , Neil Mackie , Abdelouahab Ziani
- Applicant: Daniel R. Juliano , Robert Tas , Neil Mackie , Abdelouahab Ziani
- Applicant Address: US CA Santa Clara
- Assignee: MiaSole
- Current Assignee: MiaSole
- Current Assignee Address: US CA Santa Clara
- Agency: The Marbury Law Group PLC
- Main IPC: H01L31/032
- IPC: H01L31/032
Abstract:
A sputtering target includes at least one metal selected from copper, indium and gallium and a sodium containing compound.
Information query
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