Invention Grant
- Patent Title: Imagers having electrically active optical elements
- Patent Title (中): 具有电活动光学元件的成像器
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Application No.: US11850801Application Date: 2007-09-06
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Publication No.: US07935560B2Publication Date: 2011-05-03
- Inventor: Brent A. Anderson , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant: Brent A. Anderson , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony Canale
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of fabricating a CMOS image sensor comprising an array of active pixel cells. Each active pixel cell includes a substrate; a photosensing device formed at or below a substrate surface for collecting charge carriers in response to incident light; and, one or more light transmissive conductive wire structures formed above the photosensing device, the one or more conductive wire structures being located in an optical path above the photosensing device. The formed light transmissive conductive wire structures provide both an electrical and optical function. An optical function is provided by tailoring the thickness of the conductive wire layer to filter light according to a pixel color scheme. Alternately, the light transmissive conductive wire structures may be formed as a microlens structure providing a light focusing function. Electrical functions for the conductive wire layer include use as a capacitor plate, as a resistor or as an interconnect.
Public/Granted literature
- US20090298220A1 IMAGERS HAVING ELECTRICALLY ACTIVE OPTICAL ELEMENTS Public/Granted day:2009-12-03
Information query
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