Invention Grant
- Patent Title: Marking method and sheet for both protective film forming and dicing
- Patent Title (中): 保护膜成型和切割的标记方法和片材
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Application No.: US11271212Application Date: 2005-11-10
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Publication No.: US07935574B2Publication Date: 2011-05-03
- Inventor: Naoya Saiki , Tomonori Shinoda , Akie Hamasaki
- Applicant: Naoya Saiki , Tomonori Shinoda , Akie Hamasaki
- Applicant Address: JP Tokyo
- Assignee: Lintec Corporation
- Current Assignee: Lintec Corporation
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2004-329418 20041112
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The invention provides a marking method in which marking is performed on a protective film formed on a work with a high accuracy while suppressing a warpage and, also, a sheet for both protective film forming and dicing which is advantageously used in the method. The marking method comprises irradiating laser light to a laminated structure comprising a support film tensely supported by a ring frame, a protective film releasably laminated on the support film and a work fixed to the protective film, wherein the protective film is irradiated laser light from a side of the support film, to thereby mark the protective film.
Public/Granted literature
- US20060102987A1 Marking method and sheet for both protective film forming and dicing Public/Granted day:2006-05-18
Information query
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