Invention Grant
- Patent Title: Thin film transistor and method for fabricating the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US12853263Application Date: 2010-08-09
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Publication No.: US07935586B2Publication Date: 2011-05-03
- Inventor: Tae-Hoon Yang , Ki-Yong Lee , Jin-Wook Seo , Byoung-Keon Park
- Applicant: Tae-Hoon Yang , Ki-Yong Lee , Jin-Wook Seo , Byoung-Keon Park
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2004-0050915 20040630
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
A thin film transistor that has improved characteristics and uniformity is developed by uniformly controlling low concentration of crystallization catalyst and controlling crystallization position so that no seed exists and no grain boundary exists, or one grain boundary exists in a channel layer of the thin film transistor. The thin film transistor includes a substrate; a semiconductor layer pattern which is formed on the substrate, the semiconductor layer pattern having a channel layer of which no seed exists and no gram boundary exists; a gate insulating film formed on the semiconductor layer pattern; and a gate electrode formed on the gate insulating film. A method for fabricating the thin film transistor includes forming an amorphous silicon layer on a substrate; forming a semiconductor layer pattern having a channel layer in which no seed exists and no grain boundary exists by crystallizing and patterning the amorphous silicon layer; forming a gate insulating film on the semiconductor layer pattern; and forming a gate electrode on the gate insulating film.
Public/Granted literature
- US20110020990A1 THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2011-01-27
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