Invention Grant
US07935596B2 HTO offset and BL trench process for memory device to improve device performance
有权
HTO偏移和BL沟槽工艺为存储器件提高器件性能
- Patent Title: HTO offset and BL trench process for memory device to improve device performance
- Patent Title (中): HTO偏移和BL沟槽工艺为存储器件提高器件性能
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Application No.: US12342008Application Date: 2008-12-22
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Publication No.: US07935596B2Publication Date: 2011-05-03
- Inventor: Ning Cheng , Huaqiang Wu , Hiro Kinoshita , Jihwan Choi
- Applicant: Ning Cheng , Huaqiang Wu , Hiro Kinoshita , Jihwan Choi
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Agency: Turocy & Watson, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Memory devices having an increased effective channel length and/or improved TPD characteristics, and methods of making the memory devices are provided. The memory devices contain two or more memory cells on a semiconductor substrate and bit line dielectrics between the memory cells. The bit line dielectrics can extend into the semiconductor. The memory cell contains a charge trapping dielectric stack, a poly gate, a pair of pocket implant regions, and a pair of bit lines. The bit line can be formed by an implant process at a higher energy level and/or a higher concentration of dopants without suffering device short channel roll off issues because spacers at bit line sidewalls constrain the implant in narrower implant regions.
Public/Granted literature
- US20100155816A1 HTO OFFSET AND BL TRENCH PROCESS FOR MEMORY DEVICE TO IMPROVE DEVICE PERFORMANCE Public/Granted day:2010-06-24
Information query
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