Invention Grant
- Patent Title: Method of making small geometry features
- Patent Title (中): 制作小几何特征的方法
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Application No.: US12028847Application Date: 2008-02-11
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Publication No.: US07935604B2Publication Date: 2011-05-03
- Inventor: James William Adkisson , Jeffrey Peter Gambino , Robert Kenneth Leidy , Walter Victor Lepuschenko , David Alan Meatyard , Stephen A. Mongeon , Richard John Rassel
- Applicant: James William Adkisson , Jeffrey Peter Gambino , Robert Kenneth Leidy , Walter Victor Lepuschenko , David Alan Meatyard , Stephen A. Mongeon , Richard John Rassel
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard M. Kotulak
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of forming a small geometry feature. The method includes forming a source layer on a top surface of a substrate; forming a mandrel on a top surface of the source layer, the mandrel having a sidewall; sputtering material from the source layer onto the sidewall of the mandrel to form a sidewall layer on the sidewall of the mandrel; and removing the mandrel. Also methods to forming wires and field effect transistors of integrated circuits.
Public/Granted literature
- US20100279480A1 METHOD OF MAKING SMALL GEOMETRY FEATURES Public/Granted day:2010-11-04
Information query
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