Invention Grant
- Patent Title: Anti-fuse device structure and electroplating circuit structure and method
- Patent Title (中): 反熔丝器件结构及电镀电路结构及方法
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Application No.: US12031761Application Date: 2008-02-15
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Publication No.: US07935621B2Publication Date: 2011-05-03
- Inventor: Veeraraghavan S. Basker , Toshiharu Furukawa , William R. Tonti
- Applicant: Veeraraghavan S. Basker , Toshiharu Furukawa , William R. Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Agent Anthony J. Canale
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Disclosed are embodiments of a circuit and method for electroplating a feature (e.g., a BEOL anti-fuse device) onto a wafer. The embodiments eliminate the use of a seed layer and, thereby, minimize subsequent processing steps (e.g., etching or chemical mechanical polishing (CMP)). Specifically, the embodiments allow for selective electroplating metal or alloy materials onto an exposed portion of a metal layer in a trench on the front side of a substrate. This is accomplished by providing a unique wafer structure that allows a current path to be established from a power supply through a back side contact and in-substrate electrical connector to the metal layer. During electrodeposition, current flow through the current path can be selectively controlled. Additionally, if the electroplated feature is an anti-fuse device, current flow through this current path can also be selectively controlled in order to program the anti-fuse device.
Public/Granted literature
- US20090206447A1 ANTI-FUSE DEVICE STRUCTURE AND ELECTROPLATING CIRCUIT STRUCTURE AND METHOD Public/Granted day:2009-08-20
Information query
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