Invention Grant
- Patent Title: Titania-doped quartz glass for nanoimprint molds
- Patent Title (中): 用于纳米压印模具的二氧化钛掺杂石英玻璃
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Application No.: US12133007Application Date: 2008-06-04
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Publication No.: US07935648B2Publication Date: 2011-05-03
- Inventor: Shigeru Maida , Hisatoshi Otsuka
- Applicant: Shigeru Maida , Hisatoshi Otsuka
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-150534 20070606
- Main IPC: C03C3/06
- IPC: C03C3/06 ; C03C3/076
Abstract:
In the nanoimprint lithography, a titania-doped quartz glass having a CTE of −300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 25° C. is suited for use as nanoimprint molds.
Public/Granted literature
- US20080305941A1 TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS Public/Granted day:2008-12-11
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