Invention Grant
US07935776B2 Radiation curable and developable polyurethane and radiation curable and developable photo resist composition containing the same 有权
含可辐射固化和显影的聚氨酯和可辐射固化和显影的光致抗蚀剂组合物

Radiation curable and developable polyurethane and radiation curable and developable photo resist composition containing the same
Abstract:
The present invention relates to a radiation curable and developable polyurethane which is characterized by having a carboxy group in its main chain and a acryloyl group in its side chain and comprising the following repeat units (I), (II), and (II) in a random arrangement: wherein R1, R2, R3, R4, and T are defined in the specification. The polyurethane has a weight molecular weight measured by GPC in a range of from 3,000 to 400,000; an acid value in a range of from 5 to 120 mgKOH/g. The present invention also relates to a radiation curable and developable composition containing the polyurethane.
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