Invention Grant
US07935924B2 Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics
有权
批量制造矩形棒，平面MEMS四极杆与离子光学器件
- Patent Title: Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics
- Patent Title (中): 批量制造矩形棒，平面MEMS四极杆与离子光学器件
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Application No.: US12168439Application Date: 2008-07-07
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Publication No.: US07935924B2Publication Date: 2011-05-03
- Inventor: Kerry Cheung , Luis F. Velásquez-García , Akintunde I. Akinwande
- Applicant: Kerry Cheung , Luis F. Velásquez-García , Akintunde I. Akinwande
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gauthier & Connors LLP
- Main IPC: H01J37/12
- IPC: H01J37/12
Abstract:
A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field.
Public/Granted literature
- US20090026367A1 BATCH FABRICATED RECTANGULAR ROD, PLANAR MEMS QUADRUPOLE WITH ION OPTICS Public/Granted day:2009-01-29
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