Invention Grant
US07935926B2 Inspection equipment for fine pattern and morphology using microcolumn 有权
使用微柱的精细图案和形态的检验设备

  • Patent Title: Inspection equipment for fine pattern and morphology using microcolumn
  • Patent Title (中): 使用微柱的精细图案和形态的检验设备
  • Application No.: US11997316
    Application Date: 2006-07-31
  • Publication No.: US07935926B2
    Publication Date: 2011-05-03
  • Inventor: Ho Seob Kim
  • Applicant: Ho Seob Kim
  • Agency: Park Law Firm
  • Agent John K. Park
  • Priority: KR10-2005-0070084 20050730
  • International Application: PCT/KR2006/003010 WO 20060731
  • International Announcement: WO2007/015615 WO 20070208
  • Main IPC: G01N23/00
  • IPC: G01N23/00
Inspection equipment for fine pattern and morphology using microcolumn
Abstract:
Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object.
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