Invention Grant
US07935926B2 Inspection equipment for fine pattern and morphology using microcolumn
有权
使用微柱的精细图案和形态的检验设备
- Patent Title: Inspection equipment for fine pattern and morphology using microcolumn
- Patent Title (中): 使用微柱的精细图案和形态的检验设备
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Application No.: US11997316Application Date: 2006-07-31
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Publication No.: US07935926B2Publication Date: 2011-05-03
- Inventor: Ho Seob Kim
- Applicant: Ho Seob Kim
- Agency: Park Law Firm
- Agent John K. Park
- Priority: KR10-2005-0070084 20050730
- International Application: PCT/KR2006/003010 WO 20060731
- International Announcement: WO2007/015615 WO 20070208
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object.
Public/Granted literature
- US20080272298A1 Inspection Equipment for Fine Pattern and Morphology Using Microcolumn Public/Granted day:2008-11-06
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