Invention Grant
- Patent Title: Reduced floating body effect without impact on performance-enhancing stress
- Patent Title (中): 降低浮体效应，而不影响性能增强应力
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Application No.: US12120836Application Date: 2008-05-15
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Publication No.: US07936017B2Publication Date: 2011-05-03
- Inventor: William F. Clark, Jr. , Toshiharu Furukawa , Xuefeng Hua , Charles W. Koburger, III , Robert R. Robison
- Applicant: William F. Clark, Jr. , Toshiharu Furukawa , Xuefeng Hua , Charles W. Koburger, III , Robert R. Robison
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392
Abstract:
A method, gated device and design structure are presented for providing reduced floating body effect (FBE) while not impacting performance enhancing stress. One method includes forming damage in a portion of a substrate adjacent to a gate; removing a portion of the damaged portion to form a trench, leaving another portion of the damaged portion at least adjacent to a channel region; and substantially filling the trench with a material to form a source/drain region.
Public/Granted literature
- US20090283828A1 Reduced Floating Body Effect Without Impact on Performance-Enhancing Stress Public/Granted day:2009-11-19
Information query
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