Invention Grant
- Patent Title: Airtight package comprising a pressure adjustment unit
- Patent Title (中): 气密包装包括压力调节单元
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Application No.: US12018615Application Date: 2008-01-23
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Publication No.: US07936056B2Publication Date: 2011-05-03
- Inventor: Tomoyuki Hatakeyama
- Applicant: Tomoyuki Hatakeyama
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Priority: JP2007-015152 20070125
- Main IPC: H01L23/20
- IPC: H01L23/20

Abstract:
An airtight sealed package with a device sealed therein in an airtight manner under vacuum, the device being placed in a space defined in the airtight sealed package by a lid and a substrate, includes at least one pressure adjustment unit provided on at least one of the lid and the substrate, and configured to receive energy from an outside of the airtight sealed package, with the device sealed in the airtight manner in the airtight sealed package, to adjust pressure in the space. An energy transmission member transmits the energy to the pressure adjustment unit.
Public/Granted literature
- US20080211073A1 AIRTIGHT PACKAGE Public/Granted day:2008-09-04
Information query
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