Invention Grant
- Patent Title: Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor
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Application No.: US12256162Application Date: 2008-10-22
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Publication No.: US07936115B2Publication Date: 2011-05-03
- Inventor: Masayuki Kikushima
- Applicant: Masayuki Kikushima
- Applicant Address: JP Tokyo
- Assignee: Epson Toyocom Corporation
- Current Assignee: Epson Toyocom Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-285890 20071102
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H03H9/21

Abstract:
A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.
Public/Granted literature
- US20090115294A1 PIEZOELECTRIC RESONATOR ELEMENT, PIEZOELECTRIC RESONATOR, AND ACCELERATION SENSOR Public/Granted day:2009-05-07
Information query
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