Invention Grant
- Patent Title: Determining surface and thickness
- Patent Title (中): 确定表面和厚度
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Application No.: US12446298Application Date: 2007-10-17
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Publication No.: US07936464B2Publication Date: 2011-05-03
- Inventor: Heimo Keranen
- Applicant: Heimo Keranen
- Applicant Address: FI Espoo
- Assignee: Valtion teknillinen tutkimuskeskus
- Current Assignee: Valtion teknillinen tutkimuskeskus
- Current Assignee Address: FI Espoo
- Agency: Young & Thompson
- Priority: FI20065669 20061018
- International Application: PCT/FI2007/050561 WO 20071017
- International Announcement: WO2008/046966 WO 20080424
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
An optical radiation processing unit directs different wavelengths of the optical radiation emitted by an optical source to an object being measured from a direction that differs from the normal of a surface being measured so that the different wavelengths focus on different heights in the direction of the normal of the surface. A possible polarizer polarizes the reflected radiation in a direction perpendicular to the normal of the surface. The optical radiation processing unit directs to a detector polarized optical radiation that received from the object. The signal processing unit determines on the basis of a signal provided by the detector from the detected radiation the wavelength on which radiation is the highest, and determines the location of the surface by the determined wavelength. When measuring an object from both sides, the thickness of the object being measured is determinable using the locations of the surfaces.
Public/Granted literature
- US20100296107A1 DETERMINING SURFACE AND THICKNESS Public/Granted day:2010-11-25
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