Invention Grant
US07936798B2 Nitride based laser diode and method of manufacturing nitride based laser diode
有权
基于氮化物的激光二极管及其制造氮化物激光二极管的方法
- Patent Title: Nitride based laser diode and method of manufacturing nitride based laser diode
- Patent Title (中): 基于氮化物的激光二极管及其制造氮化物激光二极管的方法
-
Application No.: US11660345Application Date: 2005-08-09
-
Publication No.: US07936798B2Publication Date: 2011-05-03
- Inventor: Czeslaw Skierbiszewski , Sylwester Porowski , Izabella Grzegory , Piotr Perlin , Michal Leszczyński , Marcin Siekacz , Anna Feduniewicz-Zmuda , Przemyslaw Wiśniewski , Tadeusz Suski , Michal Boćkowski
- Applicant: Czeslaw Skierbiszewski , Sylwester Porowski , Izabella Grzegory , Piotr Perlin , Michal Leszczyński , Marcin Siekacz , Anna Feduniewicz-Zmuda , Przemyslaw Wiśniewski , Tadeusz Suski , Michal Boćkowski
- Applicant Address: PL Warszawa
- Assignee: Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Current Assignee: Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Current Assignee Address: PL Warszawa
- Agent Horst M. Kasper
- Priority: PL369597 20040815
- International Application: PCT/PL2005/000050 WO 20050809
- International Announcement: WO2006/019326 WO 20060223
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
The laser diode comprising crystalline substrate (1) where set of subsequent n-type layers, set of optically active layers (5) and set of p-type layers is deposited. The set of n-type layers comprise at least one buffer layer (2), bottom n-type cladding layer (3) and n-type bottom waveguide layer. The set of p-type layers comprise at least p-type upper waveguide, which comprises electron blocking layer, upper p-type cladding layer (7) and p-type contact layer (8). The electron blocking layer comprises Inx, AlyGa1-x-y, N alloy doped with magnesium where 1≧x>0.001 a 1≧y 0. The way of making this invention is based on the epitaxial deposition of subsequent set of the n-type layers (2, 3, 4), set of optically active layers (5) and set of p-type layers (6, 7, 8) where the p-type waveguide layer (6) and p-type contact layer (7) is deposited with presence of indium in plasma assisted molecular beam epitaxy method.
Public/Granted literature
- US20080107144A1 Nitride Based Laser Diode and Method of Manufacturing Nitride Based Laser Diode Public/Granted day:2008-05-08
Information query