Invention Grant
US07936860B2 X-ray condensing method and its device using phase restoration method
有权
X射线冷凝法及其装置采用相位恢复法
- Patent Title: X-ray condensing method and its device using phase restoration method
- Patent Title (中): X射线冷凝法及其装置采用相位恢复法
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Application No.: US12440121Application Date: 2007-12-27
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Publication No.: US07936860B2Publication Date: 2011-05-03
- Inventor: Kazuto Yamauchi , Hidekazu Mimura , Hiromi Okada
- Applicant: Kazuto Yamauchi , Hidekazu Mimura , Hiromi Okada
- Applicant Address: JP Kobe-Shi JP Suita-Shi
- Assignee: JTEC Corporation,Osaka University
- Current Assignee: JTEC Corporation,Osaka University
- Current Assignee Address: JP Kobe-Shi JP Suita-Shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2006-357566 20061228
- International Application: PCT/JP2007/075132 WO 20071227
- International Announcement: WO2008/081873 WO 20080710
- Main IPC: G21K1/06
- IPC: G21K1/06 ; G01D18/00 ; G01N23/04

Abstract:
An X-ray condensing method and its device are provided with an X-ray mirror that has a wavefront adjustable function to finely adjust a wavefront of a reflecting X-ray, measure an X-ray intensity distribution in the vicinity of a focus, measure an X-ray intensity distribution in the vicinity of the X-ray mirror or use a known X-ray intensity distribution of an incident X-ray, calculate a complex amplitude distribution at the reflective surface by using a phase restoration method from the X-ray intensity distribution in the vicinity of the focus and the X-ray intensity distribution in the vicinity of the reflective surface, calculate a wavefront aberration of an X-ray condensing optical system from the complex amplitude distribution, and control the reflective surface of the X-ray mirror with the wavefront adjustable function so that the wavefront aberration is minimized.
Public/Granted literature
- US20100183122A1 X-RAY CONDENSING METHOD AND ITS DEVICE USING PHASE RESTORATION METHOD Public/Granted day:2010-07-22
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