Invention Grant
- Patent Title: Waveguide for thermo optic device
- Patent Title (中): 波导用于光电装置
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Application No.: US12780601Application Date: 2010-05-14
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Publication No.: US07936955B2Publication Date: 2011-05-03
- Inventor: Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
- Applicant: Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman, Lundberg & Woessner, P.A.
- Main IPC: G02B6/26
- IPC: G02B6/26

Abstract:
A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
Public/Granted literature
- US20100220958A1 WAVEGUIDE FOR THERMO OPTIC DEVICE Public/Granted day:2010-09-02
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