Invention Grant
- Patent Title: Sealed capacitive sensor
- Patent Title (中): 密封电容传感器
-
Application No.: US12070849Application Date: 2008-02-21
-
Publication No.: US07938014B2Publication Date: 2011-05-10
- Inventor: Peter G. Meehan , William Hunt , Eamon Hynes , John O'Dowd , Oliver Kierse
- Applicant: Peter G. Meehan , William Hunt , Eamon Hynes , John O'Dowd , Oliver Kierse
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01L1/14
- IPC: G01L1/14
Abstract:
A sealed capacitive sensor includes a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap and a sealing medium connecting together the substrate and fixed plate in an integrated structure and hermetically sealing the gap.
Public/Granted literature
- US20080210013A1 Sealed capacitive sensor Public/Granted day:2008-09-04
Information query
