Invention Grant
- Patent Title: Ultrasonic bonding apparatus
- Patent Title (中): 超声波接合装置
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Application No.: US12564423Application Date: 2009-09-22
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Publication No.: US07938160B2Publication Date: 2011-05-10
- Inventor: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- Applicant: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
An ultrasonic bonding apparatus includes an ultrasonic bonding unit, and a wiping unit configured to wipe out pre-cured underfill that has adhered to a tool surface of a head, by using a wiping member. The ultrasonic bonding unit includes a first driver configured to drive the head to press an electronic component upon a substrate, and an ultrasonic generator. The wiping unit includes a wiping table used to wipe out the tool surface, a feed mechanism configured to supply a wiping member to the wiping table and to roll up the wiping member, a cartridge configured to house the wiping table and the feed mechanism, and a second driver configured to drive the cartridge in the plane. The first driver is configured to press the head upon the wiping member on the wiping table.
Public/Granted literature
- US20100038406A1 ULTRASONIC BONDING APPARATUS Public/Granted day:2010-02-18
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