Invention Grant
- Patent Title: Arrangement and method for compensating emitter tip vibrations
- Patent Title (中): 用于补偿发射器尖端振动的布置和方法
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Application No.: US12209079Application Date: 2008-09-11
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Publication No.: US07939800B2Publication Date: 2011-05-10
- Inventor: Juergen Frosien
- Applicant: Juergen Frosien
- Applicant Address: DE Heimstetten
- Assignee: ICT, Integrated Circuit Testing, Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee: ICT, Integrated Circuit Testing, Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, L.L.P.
- Priority: EP05022818 20051019
- Main IPC: H01J37/30
- IPC: H01J37/30 ; G02B21/00
Abstract:
The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for repeatedly measuring the location of the emitter; and a deflector system for compensating variations in the location of the emitter.
Public/Granted literature
- US20090001266A1 ARRANGEMENT AND METHOD FOR COMPENSATING EMITTER TIP VIBRATIONS Public/Granted day:2009-01-01
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