Invention Grant
- Patent Title: Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method
- Patent Title (中): 电子束观测装置采用试样前磁场作为成像透镜和样本观察方法
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Application No.: US12270422Application Date: 2008-11-13
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Publication No.: US07939801B2Publication Date: 2011-05-10
- Inventor: Hiroto Kasai , Ken Harada
- Applicant: Hiroto Kasai , Ken Harada
- Applicant Address: JP Tokyo
- Assignee: HItachi, Ltd.
- Current Assignee: HItachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, P.C.
- Priority: JP2008-033945 20080215
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of ⅕ to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.
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