Invention Grant
US07939918B2 Chip packages with covers 有权
带盖的芯片封装

Chip packages with covers
Abstract:
This invention discloses a crystalline substrate based device including a crystalline substrate having formed thereon a microstructure; and at least one packaging layer which is sealed over the microstructure by means of an adhesive and defines therewith at least one gap between the crystalline substrate and the at least one packaging layer. A method of producing a crystalline substrate based device is also disclosed.
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