Invention Grant
- Patent Title: Microprobe array structure and method for manufacturing the same
- Patent Title (中): 微阵列阵列结构及其制造方法
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Application No.: US11599303Application Date: 2006-11-15
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Publication No.: US07941201B2Publication Date: 2011-05-10
- Inventor: Jin-Chern Chiou , Chen-Chun Hung , Chih-Wei Chang
- Applicant: Jin-Chern Chiou , Chen-Chun Hung , Chih-Wei Chang
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Rosenberg, Klein & Lee
- Priority: TW95120528A 20060609
- Main IPC: A61B5/04
- IPC: A61B5/04

Abstract:
A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.
Public/Granted literature
- US20080009763A1 Microprobe array structure and method for manufacturing the same Public/Granted day:2008-01-10
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