Invention Grant
- Patent Title: Exposure apparatus and parameter editing method
- Patent Title (中): 曝光装置和参数编辑方法
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Application No.: US11390436Application Date: 2006-03-28
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Publication No.: US07941234B2Publication Date: 2011-05-10
- Inventor: Sentaro Aihara
- Applicant: Sentaro Aihara
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2005-106786 20050401
- Main IPC: G05B15/00
- IPC: G05B15/00 ; G06F3/00

Abstract:
An exposure apparatus for exposing a substrate to radiation based on parameters. The apparatus includes a display, an input device, and a processor configured to execute a program for editing the parameters. The processor is configured to cause, in accordance with the program, the display to display a first group of a first classification name for classifying the parameters, a plurality of names of works to be executed by the apparatus, a second group of a second classification name for classifying the parameters, a plurality of names of functions, each of which is contained in at least one of the works, and contents of parameters corresponding to a combination of one of the plurality of names of works of the first classification name and one of the plurality of names of functions of the second classification name, respectively selected by the input device.
Public/Granted literature
- US20060224269A1 Exposure apparatus and parameter editing method Public/Granted day:2006-10-05
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