Invention Grant
- Patent Title: Electromechanical device with optical function separated from mechanical and electrical function
- Patent Title (中): 具有光学功能的机电装置与机电功能分离
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Application No.: US11772777Application Date: 2007-07-02
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Publication No.: US07944599B2Publication Date: 2011-05-17
- Inventor: Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
- Applicant: Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
Public/Granted literature
- US20080013145A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION Public/Granted day:2008-01-17
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