Invention Grant
US07946153B2 Method for measuring gases and/or minimizing cross sensitivity in FET-based gas sensors
有权
在基于FET的气体传感器中测量气体和/或最小化交叉灵敏度的方法
- Patent Title: Method for measuring gases and/or minimizing cross sensitivity in FET-based gas sensors
- Patent Title (中): 在基于FET的气体传感器中测量气体和/或最小化交叉灵敏度的方法
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Application No.: US11587173Application Date: 2005-04-22
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Publication No.: US07946153B2Publication Date: 2011-05-24
- Inventor: Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Elfriede Simon
- Applicant: Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Elfriede Simon
- Applicant Address: DE Freiburg
- Assignee: Micronas GmbH
- Current Assignee: Micronas GmbH
- Current Assignee Address: DE Freiburg
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: DE102004019604 20040422
- International Application: PCT/EP2005/004318 WO 20050422
- International Announcement: WO2005/103668 WO 20051103
- Main IPC: G01N7/00
- IPC: G01N7/00

Abstract:
A gas sensor based on a field effect transistor (“FET”) evaluates both a change in work function of a gas-sensitive layer of the FET and a change in the capacitance of the layer. Thus, two physically independent signals are read from the gas-sensitive layer, each signal representing a sensitivity to a different gas. This reduces the effect of cross-sensitivities; that is, of one gas on the target gas. The underlying physical mechanisms, the first causing a change in the work function in a reaction with gases and the second causing a change in the capacitance of the sensitive layer, are widely different. Because of this, the two parameters demonstrate different gas sensitivities. If the reactions to both gases are known, the effect of the interfering gas on the sensor signal can be compensated for, and with this the concentration of the target gas can be determined.
Public/Granted literature
- US20080016949A1 Method For Measuring Gases And/Or Minimizing Cross-Sensitivities In Fet-Based Gas Sensors Public/Granted day:2008-01-24
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