Invention Grant
US07946767B2 Hydrostatic bearing and stage apparatus 有权
静压轴承和平台装置

Hydrostatic bearing and stage apparatus
Abstract:
A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured to jet air onto the sliding surface; and a suction part having a suction surface configured to suction the air jetted from the jetting surface onto the sliding surface. The suction surface is situated at one of an internal circumferential side and an external circumferential side of the jetting part and is positioned higher than a lower end of the jetting part.
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